溅射靶材
Products
Titanium aluminum target material TiAl
Retail price
Market price
Weight
Stock remaining
2000
隐藏域元素占位
- 产品描述
-
- Commodity name: Titanium aluminum target material TiAl
The titanium and aluminum targets produced by the company are produced by advanced vacuum hot pressing and hot isostatic pressing processes. The products include rectangular targets, arc targets and integral forming tube targets with large aspect ratio. They have the advantages of wide composition ratio range (aluminum content is 10at%~ 90at%), high purity and density, fine and uniform grains, long service life, etc.
The titanium and aluminum targets produced by the company are produced by advanced vacuum hot pressing and hot isostatic pressing processes. The products include rectangular targets, arc targets and integral forming tube targets with large aspect ratio. They have the advantages of wide composition ratio range (aluminum content is 10at%~ 90at%), high purity and density, fine and uniform grains, long service life, etc. The typical composition ratios of titanium-aluminum targets are 33:67at%, 50:50at%, 30:70at%, 70:30at%, 20:80at%, 40:60at%, 50:50at%, etc. Targets with special compositions and specifications such as Ti-Al-X(X = Si, Cr, Y, B, V) can also be customized according to customer requirements. At present, the typical composition of titanium-aluminum-silicon is 30:60:10at%, 40:40:20at%, 28:52:20at%, 45:45:10at%.
Our titanium-aluminum target including rectangular target, arc target and large aspect ratio integral forming tube target is manufactured by hot isostatic pressing and hot pressing technology and has the advantages of wide range of component (The content of aluminum is 10% ~ 90at%), high purity and density, fine and uniform grain size and long service life. The typical component of titanium-aluminum target is 33:67at%, 50:50at%, 30:70at%，70:30at% ，20:80at%、40:60at%、50:50at% and so on. The target of special component and specification such as Ti-Al-X (X=Si, Cr, Y, B, V) can also be customized according to the customer's requirements. Currently the typical component of titanium-aluminum-silicon target is 30:60:10at%、40:40:20at%、28:52:20at%、45:45:10at%.
titanium aluminum target
Titanium-aluminum targetPerformance
Product performanceChemical composition/at%
CompositionTi33Al67
Ti50Al50
Ti70Al30
Purity/%
Purity99.8
99.8
99.8
Density/g/cm3
Density≥ 3.29
≥ 3.60
≥ 3.95
Grain size/μm
Grain size≤100
≤100
≤100
Total metal impurities/ppm
Total content of metallic impurities≤ 2000
≤ 2000
≤ 2000
Thermal conductivity/W/m. K
Thermal conductivity98
70
40
Coefficient of thermal expansion/1/K
Coefficient of thermal expansion1.9 × 10-5
1.75 × 10-5
1.35 × 10-5
Size/mm
Sizeplanar target
Planar target≤ 1500 × 500
≤ 1500 × 500
≤ 1500 × 500
rotating target
Rotating targethot isostatic pressing integral forming
Integral forming by HIP
Length ≤ 2000
Thickness Thickness ≤ 15hot isostatic pressing integral forming
Integral forming by HIP
Length ≤ 2000
Thickness Thickness ≤ 15hot isostatic pressing integral forming
Integral forming by HIP
Length ≤ 2000
Thickness Thickness ≤ 15TiAl (20:80at%)
Ingredients (elements)
Titanium (Ti)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Chlorine (Cl)
Oxygen (O)
Test values (wt%)
30.67
69.01
0.075
0.085
0.03
0.002
0.004
0.015
0.013
0.095
Density (g/cm3）（Density)
3.08
TiAl (30:70at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Chlorine (Cl)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
43.1
56.4
0.066
0.075
0.03
0.002
0.008
0.016
0.013
0.095
0.003
Density (g/cm3）（Density)
3.24
TiAl (33:67at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Sulfur (S)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
46.3
53.2
0.066
0.075
0.03
0.002
0.008
0.016
0.013
0.095
0.003
Density (g/cm3）（Density)
3.29
TiAl (40:60at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Sulfur (S)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
54.2
45.5
0.075
0.085
0.03
0.002
0.004
0.015
0.013
0.062
0.0026
Density (g/cm3）（Density)
3.39
TiAl (50:50at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Sulfur (S)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
63.7
35.9
0.075
0.085
0.03
0.002
0.004
0.015
0.013
0.095
0.0026
Density (g/cm3）（Density)
3.61
TiAl (60:40at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Sulfur (S)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
72.49
27.13
0.075
0.085
0.03
0.002
0.004
0.015
0.013
0.095
0.0026
Density (g/cm3）（Density)
3.79
TiAl (70:30at%)
Ingredients (elements)
Chromium (Cr)
Aluminum (Al)
Silicon (Si)
Iron (Fe)
Magnesium (Mg)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Sulfur (S)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
80.27
19.35
0.075
0.085
0.03
0.002
0.004
0.015
0.013
0.095
0.0026
Density (g/cm3）（Density)
3.96
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Company address: No.16, East Road, Xiong Erzhai Township, Pinggu District, Beijing
Contact Phone:+86-131-4682-7737
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