溅射靶材
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Silicon aluminum target material SiAl
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- 产品描述
-
- Commodity name: Silicon aluminum target material SiAl
The silicon aluminum target material produced by the company adopts advanced hot isostatic pressing process and thermal spraying process. The products include rectangular target, circular arc target and tube target, which have the advantages of wide composition ratio range (aluminum content is 10at%~ 90at%), high purity and density, fine grain uniformity and long service life.
The silicon aluminum target material produced by the company adopts advanced hot isostatic pressing process and thermal spraying process. The products include rectangular target, circular arc target and tube target, which have the advantages of wide composition ratio range (aluminum content is 10at%~ 90at%), high purity and density, fine grain uniformity and long service life. The typical composition ratio of silicon aluminum target material is 90:10wt%, 70:30wt%, etc., and the special composition and specification target material can also be customized according to customer requirements.
Our silicon-aluminum target including rectangular target, arc target and tube target is manufactured by hot isostatic pressing and thermal spraying technology and has the advantages of wide range of component (The content of aluminum is 10% ~ 90at%), high purity and density, fine and uniform grain size and long service life. The typical component of silicon-aluminum target is 90:10wt%, 70:30wt% and so on. The silicon-aluminum target of special component and specification can also be customized according to the customer's requirements.
silicon aluminum target
Silicon-aluminum targetPerformance
Product performanceChemical composition/at%
CompositionSi90Al10
Si70Al30
Purity/%
Purity99.8
99.8
Density/g/cm3
Density≥ 2.31
≥ 2.41
Grain size/μm
Grain size≤100
≤100
Total metal impurities/ppm
Total content of metallic impurities≤ 2000
≤ 2000
Size/mm
Sizeplanar target
Planar targethot isostatic pressing
Hot isostatic pressing
≤ 1000 × 250hot isostatic pressing
Hot isostatic pressing
≤ 1000 × 250rotating target
Rotating targetthermal spray forming
thermal spraying
Length ≤ 4000
Thickness Thickness ≤ 15thermal spray forming
thermal spraying
Length ≤ 4000
Thickness Thickness ≤ 15SiAl (90:10 wt%)
Ingredients (elements)
Silicon (Si)
Aluminum (Al)
Iron (Fe)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Calcium (Ca)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
90.19
9.66
≤ 0.074
0.002
0.002
0.04
0.002
≤ 0.04
0.04
Density (g/cm3）（Density)
2.36
SiAl (70:30 wt%)
Ingredients (elements)
Silicon (Si)
Aluminum (Al)
Iron (Fe)
Copper (Cu)
Manganese (Mn)
Carbon (C)
Calcium (Ca)
Oxygen (O)
Nitrogen (N)
Test values (wt%)
70.81
28.93
≤ 0.071
0.002
0.002
0.04
0.002
≤0.05
0.04
Density (g/cm3）（Density)
2.42
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Company address: No.16, East Road, Xiong Erzhai Township, Pinggu District, Beijing
Contact Phone:+86-131-4682-7737
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